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Tantalum

293 bytes removed, 2 years ago
{{#vardefine:restriction|0}} <!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals, 4 = varies
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A description & relevant information for this material need Tantalum (Ta) is a chemical element with the atomic number 73. It is a part of the refractory metals group. These metals are widely used as compounds in alloys. The physical properties are being dense, ductile, hard, and highly conductive to be addedboth heat and electricity. If In appearance it is not grown or deposited in the lab make sure this a dark grey in mentioned herecolor.
==Equipment==
Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
===Deposition Equipment===
*Tools in the LNF for depositing this material.[[Angstrom Engineering Evovac Evaporator]]*[[Lab 18-1]]
===Etching Equipment===
*Tools in the LNF for etching this material.
===Characterization Equipment===
*Metrology/Characterization equipment available in the LNF for measuring physical, optical, and surface properties of this material.[[Dektak XT]]
==Applications==
*Discuss common uses/applications for this material. Why this materials In electronic equipment, tanatalum is often used in the LNF?mobile phones, dvd layers and video game consoles as capacitors.
==Processes==
===Deposition Processes===
* List of technologies for depositing this material and relevant process information specific to this material associated with this equipment/type of process.[[Electron_beam_evaporation|E-beam evaporation]]
*[[Sputter_deposition|Sputter deposition]]
===Etching Processes===
* List of technologies for [[Plasma etching/pattering this material and relevant process information specific to this material associated with this equipment/type of process.]]
===Characterization Processes===
* List of techniques for metrology/characterization The Dektak can be used with this material and relevant process information specific to this material associated with this equipment/type measure the thickness of processthe deposition.
==Other Relevant Material Information==
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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