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GSI PECVD

5 bytes removed, 2 years ago
*Gases
**Standard Gasbox Mounted MFC's
***[[Silane|SI<sub>HSiH<sub>4</sub>]] - 300 sccm
***[[Silane|SI<sub>H<sub>4</sub>]] - 5 sccm
***[[Oxygen|O<sub>2</sub>]] - 1000 sccm
Administrator, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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