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Tantalum

160 bytes removed, 2 years ago
*[[Lab 18-1]]
===Etching Equipment===
* [[LAM 9400]]
===Characterization Equipment===
*[[Dektak XT]]
*[[Sputter_deposition|Sputter deposition]]
===Etching Processes===
* List of technologies for [[Plasma etching/pattering this material and relevant process information specific to this material associated with this equipment/type of process.]]
===Characterization Processes===
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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