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YES-CV200RFS(E)

55 bytes added, 2 years ago
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|chemicals =
|gases = [[Oxygen|O<sub>2</sub>]]<br>[[Argon|Ar]]<br>[[Nitrogen|N<sub>2</sub>]]<br>[[Nitrogen trifluoride|NF<sub>3</sub>]]
|overview = [[{{PAGENAME}}#System_Overview | https://docs.google.com/document/d/1_SuK2pT4-UpRSkNf-PoX7XqlG3RwligcaLaQCZWBUzI/preview System Overview]]
|sop = [https://docs.google.com/document/d/19PctJdqREy4frN86fx64_3rUvEWrNNYzJGmFwif_978/preview SOP]
|processes = [https://docs.google.com/document/d/1DZ8SI3aaDfWiGep59aFnqrxW6jufzdZ9JXu8U5ckWW4/preview Supported Processes]
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