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YES-CV200RFS(E)

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|chemicals =
|gases = [[Oxygen|O<sub>2</sub>]]<br>[[Argon|Ar]]<br>[[Nitrogen|N<sub>2</sub>]]<br>[[Nitrogen trifluoride|NF<sub>3</sub>]]
|overview manual = [https://docs.google.com/document/d/1_SuK2pT41BIA91s15C-UpRSkNf-PoX7XqlG3RwligcaLaQCZWBUzI1ja4j1KIjTy3KRzyjeq0Fjywk2CdsCTtA/preview System OverviewUser Manual]|sop overview = [https://docs.google.com/document/d/1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI/preview SOP[{{PAGENAME}}#System_overview | System overview]]|processes = [https://docs.google.com/document/d/1DZ8SI3aaDfWiGep59aFnqrxW6jufzdZ9JXu8U5ckWW4/preview [{{PAGENAME}}#Supported_processes | Supported Processesprocesses]]
|userprocesses =
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
==Announcements==
'''59/211/2020'''{{note|Several important changes to the operating procedure have been implemented. The new SOP has been placed at Usage of custom recipes on the tool for referencenow require additional training. At this time, all users’ access has been removed. In order to restore your access to Please follow the tool, please review the new SOP and complete the questions instructions in the quiz (both referenced checkout procedure below). We The access code will be reviewing responses weeklychanged on October 1, but if you urgently need 2020 and any users who have not completed the procedure will no longer have access to the tool, please also create a helpdesk ticketrecipe editor.|reminder}}* [https://docs.google.com/document/d/1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI/preview SOP[{{PAGENAME}}#Super_user_checkout_procedure | Checkout procedure]* [https://docs.google.com/forms/d/e/1FAIpQLSeATwiGb6Xcj3qkHTf-itgDM6iodjWYsyetlaP8LlrjiuNbrA/viewform?usp=sf_link Quiz]
'''5/20/2020'''
* [[Fluorocarbon]] removal in high aspect ratio structures
==System Overviewoverview==
===Hardware Details===
* Downstream RF plasma: up to 1000 W
* Gases: O<sub>2</sub>, Ar, N<sub>2</sub>, NF<sub>3</sub>
===Substrate Requirementsrequirements===
* Handles up to 8” wafers and wafer pieces
* Single wafer processing(or dual 4" wafers)
* Max sample thickness: 3 mm
===Material Restrictionsrestrictions===
{{material restrictions}}
==Supported Processesprocesses==
The tool is provided with 6 characterized recipes, shown in the table below. Process time is chosen on the main panel before starting the recipe. The original process times for recipes 1, 2, and 4 have been included for reference. If you need process adjustment beyond this, please consult a tool engineer before creating a recipe to be authorized to edit recipes, and please do not save over the 6 supported recipes. There are 12 recipe slots in total, please save your recipe to one of 7-12. We cannot guarantee that it will be there for your next run, so remember to write down your settings.
|}
Custom Use of custom recipes may be created and saved in slots 7-12requires additional training. For instructions on how to use the recipe editor, please follow the guide in section F of the SOP (below). For some guidelines on recipe development, please review Please see the [https://docs.google.com/document/d/1DZ8SI3aaDfWiGep59aFnqrxW6jufzdZ9JXu8U5ckWW4/preview standard processes[{{PAGENAME}}#Super_user_checkout_procedure | checkout procedure]] documentbelow. Custom recipes may be documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} User Processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.
==Standard Operating Procedureoperating procedure==
<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
The operating system can be found in the complete user manual, found [https://docs.google.com/document/d/1BIA91s15C-1ja4j1KIjTy3KRzyjeq0Fjywk2CdsCTtA/preview here].<!--{{#widget:GoogleDoc|key=1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI}}--> ==Checkout procedure==Follow this procedure to receive authorization to run supported processes. Practicing with an authorized user or staff member is strongly recommended but not required.# Read this page and the [https://docs.google.com/document/d/1BIA91s15C-1ja4j1KIjTy3KRzyjeq0Fjywk2CdsCTtA/preview user manual].# Accurately complete the [https://docs.google.com/forms/d/e/1FAIpQLScO2ww44I-yWO5of79tBhYEdsKA3t-KqhlBq1bg-5sgMtpaVQ/viewform?usp=sf_link checkout quiz] (you may retake if necessary).# Create a helpdesk ticket requesting authorization.# Given successful completion of the quiz, a tool engineer will authorize you on the tool.
==Checkout Procedure==
{{note|Several important changes to the operating procedure have been implemented. The new SOP has been placed at the tool for reference. At this time, all users’ access has been removed. In order to restore your access to the tool, please review the new SOP and complete the questions in the quiz (both referenced below). We will be reviewing responses weekly, but if you urgently need the tool, please also create a helpdesk ticket.|reminder}}
* [https://docs.google.com/document/d/1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI/preview SOP]
* [https://docs.google.com/forms/d/e/1FAIpQLSeATwiGb6Xcj3qkHTf-itgDM6iodjWYsyetlaP8LlrjiuNbrA/viewform?usp=sf_link Quiz]
The following steps should be taken to gain access to the tool:
# Read through this page and the Standard Operating Procedure above.
# Practice on the tool with a qualified user
# Complete the checkout quiz found [https://docs.google.com/a/lnf.umich.edu/spreadsheet/viewform?formkey=dEg0Slk3LVhfWlVLZW9oYXo4ZnNISVE6MQ#gid=0 here]
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Tickethelpdesk ticket] requesting checkout. If this checkout is successful, the engineer will authorize you on the tool.
===Super User Checkout Procedureuser checkout procedure===Coming soon# Complete the [https://docs.google.com/forms/d/e/1FAIpQLSfgiDv7_WOe_a0F3FPPf2QtZTn2xNUAJlCful_o15C5T1WJlw/viewform?usp=sf_link process request form] and create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket].# Review the procedure provided in the ticket response.# Accurately complete the quiz provided in the ticket response.# Arrange a training session with a tool engineer via the ticket.# Given successful completion of the quiz and demonstration of proper tool operation, a tool engineer will provide the access code. Do not share the access code.
==Maintenance==
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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