Changes

Jump to navigation Jump to search

YES-CV200RFS(E)

No change in size, 2 years ago
The chamber is disassembled and cleaned once per quarter and process condition is verified.
===User Authorized Maintenanceauthorized maintenance===
The only maintenance that users are authorized to perform is tool startup in the event of a power bump. Please see the [https://docs.google.com/document/d/13gVIzr2tf87rtDnioNH-qU8P1Vk_1km3w7d9oy-PnRA/preview Startup and Shutdown Procedure] for more details.
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,495

edits

Navigation menu