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LAM 9400/Processes/LNF Aluminum

19 bytes removed, 2 years ago
*ZEP: 49.4 nm/min
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=== SF<sub>6</sub> Ash ===
This is a short ashing step intended to replace Cl embedded in the sidewalls of the features with F in order to reduce how much corrosion happens when the sample encounters moisture in the air. Even small amounts of Cl on the surface of aluminum can form a HCl corrosion cell that can continually corrode aluminum.
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[[File:Aluminum corrosion on lines.jpg|left|frameless|300x300px]]
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