=== SF<sub>6</sub> Ash ===
This is a short ashing step intended to replace Cl embedded in the sidewalls of the features with F in order to reduce how much corrosion happens when the sample encounters moisture in the air. Even small amounts of Cl on the surface of aluminum can form a HCl corrosion cell that can continually corrode aluminum. Below is an example of HCl corrosion on aluminum.
[[File:Aluminum corrosion on lines.jpg|frameless|300x300px]]