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STS Pegasus 4/Processes/LNF Recipe 3

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===Open area===
*This recipe works well will not produce grass up to 100% open area*Large open areas (>50%) may require an SiO<sub>2</sub> mask, as excessive heating can cause photoresist to reticulate.
*Small (<20%) open area may cause an undesirable increase in etch rate or shift in sidewall profile due to excess Fluorine.
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