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| ICP Power
| W
| ?600
|-
| Bias Power(HF)
| W
| ?|-| Bias Pulsing| Hz| 40 Hz - 80%30
|-
| Pressure
| mTorr
| ?15
|-
| SF<sub>6</sub> Flow
| sccm
| ?300
|-
| Ar Flow
| sccm
| ?100|-| Chuck Temperature| °C| 10
|}
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