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STS Pegasus 4/Processes/LNF O2 Descum

31 bytes added, 2 years ago
| ICP Power
| W
| ?2500
|-
| Bias Power(LF)
| W
| ?75
|-
| Bias Pulsing
| Hz
| 40 Hz - 80%none
|-
| Pressure
| mTorr
| ?20
|-
| O<sub>2</sub> Flow
| sccm
| ?200|-| Ar Flow| sccm| 100
|}
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