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STS APS DGRIE/Processes

99 bytes added, 2 years ago
* [[{{FULLPAGENAME}}/Fused silica etch|Fused Silica Etch]]
*: Deep glass/fused silica etching, ~5000Å/min
* [[{{FULLPAGENAME}}/LNF_Polymer|LNF_Polymer]]
*: For etching polymers like polyimide ~920nm/min
 
 
[[Category:RIE processes]]
[[Category:DRIE processes]]
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