Changes

Jump to navigation Jump to search

LAM 9400/Processes/LNF Al2O3

67 bytes added, 1 year ago
no edit summary
[[Category:RIE]]
This is intended for etching Al<sub>2</sub>O<sub>3</sub>, and is the same as the breakthrough step from in LNF_Aluminum.
==Etch Rates==
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,126

edits

Navigation menu