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YES-310TA

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|model = 310TA (E)
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The [[YES-310TA|YES-310TA (E)]] (scheduler name '''Image Reversal Oven''') is an [[image reversal]] and [[vapor prime]] oven designed by [http://www.yieldengineering.com/ Yield Engineering Systems]. It can vapor prime wafers with [[HMDS]] in order to improve photoresist adhesion. It can also perform image reversal via [[Ammonia|NH<sub>3</sub>]]. The large oven chamber can easily accommodate anything from a piece to a box of wafers.
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