Changes

Jump to navigation Jump to search

STS Pegasus 4/Processes/LNF O2 Descum

13 bytes added, 1 year ago
no edit summary
<!-- Make sure to add any other relevant categories -->{{#ifeq: {{NAMESPACE}} | Template | | [[Category:Processes]]}}<!---->{{Infobox process
|image =
|caption =
|modified =
|authors =
}}<!---->'''{{SUBPAGENAME}}''' uses an O<sub>2</sub> plasma to isotropically remove polymers. It is intended as a photoresist descum prior to etching, although it may oxidize expose surfaces. The [[../LNF Ar Descum/]] is better suited for normal circumstances. This recipe may also be used for photoresist mask stripping post process, although there are other systems at the LNF with better performance for this process.
==Procedure==
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,495

edits

Navigation menu