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STS Pegasus 4/Processes/LNF Si Thinning 1

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<!-- Make sure to add any other relevant categories -->{{#ifeq: {{NAMESPACE}} | Template | | [[Category:Processes]]}}{{warning|This page has not been released yet.}}{{Infobox process
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'''{{SUBPAGENAME}}''' (previously known as '''LNF Si ThinningEtch''') is an SF<sub>6</sub> based process intended for isotropic thinning of Si wafers for device release. It does not have high uniformity, but has good selectivity to other materials.
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