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STS Pegasus 4/Processes/LNF Si Thinning 2

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<!-- Make sure to add any other relevant categories -->{{#ifeq: {{NAMESPACE}} | Template | | [[Category:Processes]]}}{{warning|This page has not been released yet.}}{{Infobox process
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'''{{SUBPAGENAME}}''' (previously known as '''LNF si thinning - slow 1''') is an SF<sub>6</sub> based process intended for isotropic thinning of Si wafers for device release. This recipe was previously known as '''LNF si thinning - slow 1'''.
==Procedure==
|-
| Silicon nitride
| ?700 Å/min| ?2%|-| Low stress nitride| 590 Å/min| 2%
|-
| SPR 220
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