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PVD 75 Proline

646 bytes removed, 4 months ago
{{infobox equipment
|restriction = [[{{PAGENAME}}#Material_Restrictions|Semi-Clean]]
|materials = [[Aluminum|Al]], [[Al2O3|Al<sub>2</sub>O<sub>3</sub>]], [[Chromium|Cr]], [[Copper|Cu]],[[Cobalt|Co]],[[Iron|Fe]], [[Nickel|Ni]],[[Molybdenum|Mo]], [[Silicon|Si]], [[Silicon Dioxide|SiO<sub>2</sub>]], [[Silicon Nitride|Si<sub>3</sub>N<sub>4</sub>]], [[Silver|Ag]],[[Titanium|Ti]],[[Tungsten|W]]
|mask =
|size = 150mm x 4mm and smaller samples
<!-- *Update this with announcements as necessary -->
*The target change process on this tool is a user supported process[https://docs. That can be completed during the tool reservation when the chamber is vented to load| LNF Sputter Calendar]
| 5000Å / NA
|Iron ([[Iron|IrFe]])
|2000Å / 6000Å
==Standard Operating Procedure==
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==Checkout Procedure==
The PVD 75 is on the [[LNF Scheduler]]. LNF constituents may reserve time on the tool, and even request staff support for process development.
For more details, see [[KJLC Sputter Tool Access and Training]].
<!-- This is an example a chart published with etch data. You can just replace the url with your own. --> #Complete the following items#*Read the Standard Operating Procedure above#*Review all of the Wiki pages associated with this tool#*online [| PVD 75 Tool VerificationRise Training](this only needs to completed once so if you are authorized on another PVD tool or sputter tool, you do not need to do it again.)#*[https://docs.googleRead through this Wiki page and the Operating Procedure| PVD 75 User Detailed Procedure]#*Create a [https| PVD 75 User Training Quiz]<!--==#*<iframe src="https:edu/sselScheduler/" frameborder="0" width="480" height="299" allowfullscreen="true" mozallowfullscreen="true" webkitallowfullscreen="true"></iframe>==--><!--:0:0:{{# Complete the training request form [<link> herevar:toolid}} Helpdesk Ticket]. -->#Create a helpdesk ticket requesting training.#A tool engineer or user services member will schedule contact you for a time for initial trainingsession.#Practice with your mentor or another authorized user until you are comfortable with tool operation.<!--# Complete the SOP quiz [<link> here| PVD 75 User Training Quiz]. -->#Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the toolat the "user" level<!--==Tool Qualification== --><!-- Describe standard maintenance/qualification tests here -->
For more details, see [[{{BASEPAGENAME}}/Maintenance and qualification]].
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreUser


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