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Everbeing BD-6 Probe Station

476 bytes added, 2 years ago
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The [[{{PAGENAME}}]] is a system that allows for electrical testing of structures using high precision micro manipulators to bring probes into contact with structures or probe stationpads on your sample. There is a digital multimeter for use at the tool to measure resistance between the probes that are in contact with your sample.
==System overview==
===Hardware details===
* Gases* Pressure* Chuck* Chamber* RF / Power Specs* Chemicals
===Substrate requirements===
* Wafer Size* Wafer type* Any mounting?* Wafer thicknessThe vacuum stage is capable of holding small pieces, 4", and 6" wafers.
===Material restrictions===
{{material restrictions}}
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