Changes

Jump to navigation Jump to search

STS Pegasus 4/Processes/LNF Recipe 1

No change in size, 1 year ago
====Trench====
Running recipe 1 for 20 minutes with 3 µm of [[SPR 220]] on a silicon wafer with our standard DRIE characterization mask can produce a profile like this.
<gallery mode="packed-hover" heights="200px180px">
File:STS Pegasus_4_Recipe_1_2_um.jpg|Recipe 1 for 20 min, 2 µm Trench
File:STS Pegasus_4_Recipe_1_10_um.jpg|Recipe 1 for 20 min, 10 µm Trench
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,495

edits

Navigation menu