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STS Pegasus 4

85 bytes removed, 1 year ago
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|size = 100 mm
|gases = [[Ar|Ar]], [[C4F8|C<sub>4</sub>F<sub>8</sub>]], [[O2|O<sub>2</sub>]], [[SF6|SF<sub>6</sub>]]
|chemicals = |overview = [https://docs.google.com/a/lnf.umich.edu/document/d/1UZYJ8unAjQOIJ3nJpa1fwXxYKMyW12k6eDR-A-P6fIE/preview [{{PAGENAME}}#System overview | System Overviewoverview]]|sop = [https://docs.google.com/a/lnf.umich.edu/document/d/1EPC0U7RQCQLbFe4fL90aMUlLz-fydskqWrUs4hVPpbM1cjgR7raEGa5GBDGlEKmrBnhmy0U7zcAUUxtmbDntjus/preview SOP]|processes = [[STS_Pegasus_4/Processes|Supported Processesprocesses]]|userprocesses = [[LNF_User:STS_Pegasus_4_User_Processes|User Processesprocesses]]
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
}}
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