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YES-CV200RFS(E)

16 bytes added, 1 year ago
==Maintenance==
* A leak check and plasma clean is performed monthly* The chamber is disassembled and cleaned once per quarter and process condition is verified.twice a year
===User authorized maintenance===
The only maintenance that users are authorized to perform is tool startup in the event of a power bump. Please see the [https://docs.google.com/document/d/13gVIzr2tf87rtDnioNH-qU8P1Vk_1km3w7d9oy-PnRA/preview Startup and Shutdown Procedure] for more details.
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