OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
120
edits
Changes
Jump to navigation
Jump to search
The sputter shield cleaning procedure is provided below. The source shields are stored on the rack between the Lab 18s when they are not installed. Some films that build up on the shield risk flaking off and shorting out plasma (W-Ti and ITO are the most frequent offenders). This procedure mitigates that, so it is posted here to empower users.
[https://docs.google.com/document/d/1UplOHyKgBl22CuKfhqWzU72K3lhPWEDZJdxVsnRuPdw/edit?usp=sharing|Lab 18 Shield Cleaning Procedure]
For more details, see [[{{BASEPAGENAME}}/Maintenance and qualification]].
