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STS APS DGRIE/Processes/LNF Polymer

25 bytes removed, 1 year ago
==Etch Rates==
*Polyimide: 920 nm/min
*SPR 220: ?? nm/min
*Aluminum: ?? nm/min
*Platinum: ~1.5 nm/min
*SiO2: 28 nm/min
==Parameters==
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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