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PVD 75 Proline

13 bytes added, 4 months ago
{{infobox equipment
|restriction = [[{{PAGENAME}}#Material_Restrictions|Semi-Clean]]
|materials = [[Aluminum|Al]], [[Al2O3|Al<sub>2</sub>O<sub>3</sub>]], [[Chromium|Cr]], [[Copper|Cu]],[[Cobalt|Co]],[[Iron|Fe]], [[Nickel|Ni]],[[Molybdenum|Mo]], [[Silicon|Si]], [[Silicon Dioxide|SiO<sub>2</sub>]], [[Silicon Nitride|Si<sub>3</sub>N<sub>4</sub>]], [[Silver|Ag]],[[Titanium|Ti]],[[Tungsten|W]]
|mask =
|size = 150mm x 4mm and smaller samples
<!-- *Update this with announcements as necessary -->
*The target change process on this tool is a user supported process[https://docs. That can be completed during the tool reservation when the chamber is vented to load| LNF Sputter Calendar]
| 5000Å / NA
|Iron ([[Iron|IrFe]])
|2000Å / 6000Å
==Standard Operating Procedure==
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==Checkout Procedure==
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreUser


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