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SB-6E Bonder

474 bytes removed, 1 year ago
# A tool engineer will schedule a time for training and/or checkout.
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
*Anodic baseline run done monthly on 4" wafers
*chamber opened and cleaned Semi annually or as needed
*chucks cleaned every time they're changed or as needed
*clamp and spacer calibration checked bimonthly
*pressure uniformity tested as needed or when requested
===Process name===
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OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors


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