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Reactive ion etching

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{{Infobox technology|image = Rieoperation.svg|technology = Plasma etching|names = RIE|equipment = [[:Category:RIE equipment|List of RIE equipment]]}}Reactive Ion Etching ion etching (RIE) is a high resolution mechanism for [[etching ]] materialsusing [[Plasma etching|reactive gas discharges]]. Samples are first masked by one of many patterning processes. They are then placed into It is a vacuum chamber. Gases are introduced into the chamber and then activated by Rf or microwave power to create a plasma. This plasma consists of highly controllable process that can process a wide variety of reactive speciesmaterials, ionsincluding [[semiconductors]], [[dielectrics]] and electrons. A negative DC bias is induced at the substrate by the free electronssome [[Reactive metals|metals]]. This bias accelerates ions in the plasma perpendicular One major advantage to the sample surface. This provides a directional physical motivating force to the etch. Generally some form RIE over other forms of passivating component etching is incorporated such that the etch proceeds only where energetic ions strike the surface. A well tuned etch process can be very designed to be highly [[Isotropy|anisotropic]] compared to [, allowing for much finer resolution and higher aspect ratios. For a detailed overview of RIE, please review the [https:Category:Wet Bench|wet etches]//drive.google.com/file/d/0B76AgohVTgqdamFiaE1mRk9mVmM/view?usp=sharing&resourcekey=0-yGk7A8kAmb0kQArcKPNlTQ technology workshop] which are typically isotropic.
RIE is a key enabling semiconductor technology allowing IC processes to continue to approach the range of a few nanometers. This same technology may be used as a machining process for nano and micro scale devices. As such, RIE is also key enabling technology for MEMS and nanofabrication.{{TOC|limit=2|clear=left}}
==Technology Overview/Workshop PresentationEquipment==* Below is a general description of the RIE equipment at the LNF. For a complete list, please see [[https://docsCategory:RIE equipment|list of RIE equipment]].google.com/<onlyinclude>===P5000 RIE==={{main|P5000 RIE}}The P5000 is a/lnf3 chamber tool designed for production etching.umich.edu Chambers A and B are configured for SiO<sub>2</filesub> and Si<sub>3</dsub>N<sub>4</0B76AgohVTgqdamFiaE1mRk9mVmM/preview RIE Workshop January 16thsub> etching, 2015where as chamber C is configured for [[polysilicon]] and amorphous silicon etching. Chambers B and C are restricted to [[CMOS clean]] devices where as chamber A is open to [[semi-clean]] devices.
==Plasma Generation=====Capacitively Coupled PlasmaSTS APS DGRIE==={{main|STS Glass Etcher}}The glass etcher excels at deep etching of [[Fused silica|fused silica]] but it also has a nearly vertical [[silicon dioxide|SiO<sub>2</sub>]] etch. It's capable of very high bias powers enabling it to process difficult to etch materials.
===Inductively Coupled PlasmaLAM 9400 SE==={{main|LAM 9400}}The LAM 9400 SE is an [[ICP]] etcher configured with a wide range of gas chemistries. It is mainly used to etch [[polysilicon]] but can also etch [[silicon dioxide|SiO<sub>2</sub>]], [[silicon nitride|Si<sub>3</sub>N<sub>4</sub>]], [[compound semiconductors]], some [[Reactive metals|metals]], and [[polymers|organic]] materials.
===Downstream PlasmaOxford Plasmalab System 100==={{main|Oxford Plasmalab System 100}}The oxford is another ICP etcher that also has a [[cryogenic etching|cryogenic]] chuck. By cooling the sample down to -150°C nearly vertical etches are possible in certain materials.
===Plasmatherm 790==={{main|Plasmatherm 790}}The Plasmatherm is configured with a variety of gases so that it can etch a wide array of materials. Most recipes tend to have slow etch rates on the order of 200 Å/min which is ideal for very thin films. The tool also has few material restrictions to allow it to process as many things as possible.</onlyinclude> ==Deep Reactive Ion Etchingreactive ion etching=={{Mainmain|Deep reactive ion etching}} Deep reactive ion etching (DRIE), while often referring specifically to the [[Wikipedia:Bosch process|Bosch process]], generally is any RIE used to etch high aspect ratio (> 10:1) features. This may be simply a longer, well controlled RIE etch, or may use a specific process such as [[cryogenic etching]] or the [[Wikipedia:Bosch process|Bosch process]]. For all DRIE equipment at the LNF, please refer to the [[:Category:DRIEequipment|list of DRIE equipment]]. {{:Deep reactive ion etching}} ==Method of operation==Samples are first masked by one of many patterning processes. They are then placed into a vacuum chamber. Gases are introduced into the chamber and then activated by RF or microwave power to create a plasma consisting of a wide variety of reactive species, ions, and electrons. The reactive species are chosen for their ability to react chemically with the material being etched. A negative DC bias is induced at the substrate by the free electrons which accelerates the ions towards the sample surface. The energy imparted by these ions reaching the surface greatly enhances the effectiveness of the chemical reaction and provides directionality to the etch. Generally some form of [[Etch passivation|passivating]] component is incorporated such that the etch proceeds only where energetic ions strike the surface. ==Parameters==Many of the same parameters used in [[Plasma etching#Parameters|plasma etching]] apply to RIE, including pressure, gas composition, and generator power. Of particular importance is the [[plasma generation]] method (commonly a parallel plate or ICP configuration), as they have different advantages depending on the material being etched. ===DC bias===A critical parameter specific to RIE is the DC bias applied to the sample, which directly affects the physicality of the etch. Many materials (e.g. [[silicon dioxide|SiO<sub>2</sub>]]) require high activation energy to react with the gases in the reactor. Other materials ([[silicon]], in particular) may be etched using a passivating component which must be removed on the surface being etched. Still other materials have little to no reactivity and must be physically removed from the surface. In most reactors, DC bias is not controlled directly, but will depend on the conductance of the plasma and the power applied to the sample. <!--==Materials==RIE can be used to etch a wide variety of materials, including dielectrics, semiconductors, polymers, and some metals. For information on etching specific materials, please review the sections below. ===Dielectric etching==={{main|Dielectric plasma etching}}not sure if I like where this is going... <I have to agree, I think you should save this for tool pages>--> ==Complete tool list==<categorytree mode="pages">RIE equipment</categorytree> ==See also== *[[Plasma etching]]*[[Plasma processing]]<!--==Notes==<footnotes>
==References==
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==Further reading==
{{quote|text=Reactive*[http://lnf-ion etching (RIE) is an etching technology used in microfabricationwiki.eecs. It uses chemically reactive plasma to remove material deposited on wafersumich. The plasma is generated under low pressure (vacuum) by an electromagnetic fieldedu/wiki/User_Resources#LNF_Tech_Talks_. High-energy ions from the plasma attack the wafer surface and react with it28technology_seminar_series.|source=[29 LNF Tech Talk for RIE]*[wikipediahttps:Reactive//docs.google.com/document/d/1L5g-ion_etching|Wikipedia]WyoX10ZDYI9IKdeGb32dLsOeVUgFD01yvKdj544/edit Etching nano features with SF<sub>6</sub>ːO<sub>2</sub> plasma]}}
[[Category:EquipmentRIE| ]]
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