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Plasmatherm 790/Processes/m pary1

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==Limitations==
The limitations for this recipe are still being defined.
 
==Qualification==
<!-- Insert a description of how the process is qualified, generally this should include a chart to show the processes stability over time-->
Once a month m_pary1 is run on a 4" wafer coated with SPR 220 to verify it's etch rate.
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