Jump to navigation Jump to search

Plasmatherm 790/Processes/m pary1

249 bytes removed, 2 years ago
The limitations for this recipe are still being defined.
<!-- Insert a description of how the process is qualified, generally this should include a chart to show the processes stability over time-->
Once a month m_pary1 is run on a 4" wafer coated with SPR 220 to verify it's etch rate.
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors


Navigation menu