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<!-- Set the resource ID, 5 digit # found on the scheduler --> {{#vardefine:toolid|50041}} <!-- Set the Process Technology (see subcategories on Equipment page) --> {{#vardefine:technology|Contact lithography}} <!--Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals --> {{#vardefine:restriction|34}}
{{infobox equipment
|caption =
|gases =
|overview = [[{{PAGENAME}}#System_overview | System Overview]]
|sop = [ edit?usp=sharing&ouid=109740028282576410484&rtpof=true&sd=true SOP]
|processes = [[{{PAGENAME}}/Processes|Supported Processes]]
|userprocesses = [[LNF_User:{{PAGENAME}}_user_processes|User Processes]]
The [[{{PAGENAME}}]] is primarily used to expose [[Photoresist|photo-definable]] materials on small pieces up to 3" in diameter. It only accepts 4” hard masks or smaller. Transparencies, shadow masks, or flood exposure can also be used.
*Update this with announcements as necessary
==Standard operating procedure==
{{cleanup-manual|section=SOP}}<!-- To include a document from [ docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the com/document to "Anyone with the link can view". -->{{#widget:GoogleDoc|key/d/1fhmJ5T8mw2RLVgUgm0u2W7FXRHD73Srh/edit?usp=sharing&ouid=109740028282576410484&rtpof=true&sd=1cYUPWWE7AzkE-BRLHFfqDQG_HmtavqVICj8G6QGENdE}}true SOP]
==Checkout procedure==
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors


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