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AZ 12XT

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==Procedure==
===for 10-17um layers===* HMDS in YES Image Revers Reversal Oven
**For Plating, Wet etching, or glass RIE etching set the oven temp to 140°C. You need to allow 40 minutes each for the oven to heat and cool.
**RIE etching can us HMDS applied at 90°C
*Spin AZ 12xt
*Bake for 3minutes 3 minutes on a 110°C hotplate with the lid lowered
*Exposure 10-17um
**MA and MA/BA6 12-16 sec
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