* HMDS in YES Image
**For Plating, Wet etching, or glass RIE etching set the oven temp to 140°C. You need to allow 40 minutes each for the oven to heat and cool.
**RIE etching can us HMDS applied at 90°C
*Spin AZ 12xt
3minutes on a 110°C hotplate with the lid lowered
**MA and MA/BA6 12-16 sec