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AZ 12XT

52 bytes added, 1 year ago
*Spin AZ 12xt
*Bake for 3 minutes on a 110°C hotplate with the lid lowered
*Exposure **10-17umlayers**MA and MA/BA6 *Contact Alingers 12-16 sec***Stepper 0.27-0.3 sec, Focus -30-0.**>17um ***Contact Alingers 20-22sec
*Bake
** For 3 and 4k spins - 1 minute on a 90° hotplate with the lid lowered
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