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AZ 12XT

66 bytes added, 1 year ago
**RIE and wet etching can us HMDS applied at 90°C
*Spin AZ 12xt
*Bake for Softbake ** 2-4K 3 minutes on a 110°C hotplate with the lid lowered**1K 4 minutes on a 110°C hotplate with the lid lowered
*Exposure
**10-17um layers
***Stepper 0.27-0.3 sec, Focus -30-0.
**>17um
***Contact Alingers 20-22sec24sec
*Bake
** For 3 and 4k spins - 1 minute on a 90° hotplate with the lid lowered
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