Changes

Jump to navigation Jump to search

AZ 12XT

4 bytes added, 1 year ago
**10-17um layers
***Contact Alingers 12-16 sec
***Stepper 0.2722-0.3 24 sec, Focus -30to -0.50
**>17um
***Contact Alingers 20-24sec
*Develop on the CEE Develop stations using 726 DP 60-60
*Hard Bake
**For wet etching or platting hard bake at 110°C for 1 minute.
*Removal
**For thickness <17um spins removal as normal. (ash, PRS-2000, nanostrip)
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
1,254

edits

Navigation menu