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==Supported Processes==
{{expand section|adding links to PR datasheets/pages}}
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} -->Exposure of all LNF approved Photoresists (including SU-8 resists) is permitted in this tool. Data sheets for specific Photoresists can be found in the Solvent Bench 94 manual.
Administrator, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser


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