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CMP Strasbaugh 6EC

5 bytes removed, 2 years ago
* Carrier can be a blank wafer. The CMP tool is NOT designed to polish pieces. Although mounting them on a 4" or 6" wafers will make it possible, the polishingresults will not be optimal. The surface finish, will be at par with specifications but the overall uniformity will suffer, the edges of the pieces will see a higher polishing rate. You should consider using the lapper to polish (cmp) pieces.
*For mounting suggestions please refer to the Logitech 5PM lapper instructions.
===Material restrictions===
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