Administrator, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
329
edits
Changes
Jump to navigation
Jump to search
<!-- Describe standard maintenance/qualification tests here -->
*Chamber maintenance is performed after every 50 75 um's of deposition.
*Following chamber maintenance, a monitor wafer is run on one of the LNF supported standard processes (typically Oxide 200 1500 angstroms) to check tool performance and film characteristics.
<!--
