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AZ 12XT

No change in size, 1 year ago
Users should note that this is not a DNQ resist and is not compatible with the image reversal process used in the [[Image Reversal Oven|YES-310TA]].
==Procedure==
===for 10-17um 25um layers===
* HMDS in YES Image Reversal Oven
*Spin AZ 12xt
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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