Changes

Jump to navigation Jump to search

AZ 12XT

No change in size, 1 year ago
*Exposure (see characterization data below)
**10-17um layers
***Contact Alingers Aligners 12-16 sec
***Stepper 0.22-0.24 sec, -50
**>17um
***Contact Alingers Aligners 20-24sec
*Bake
** For 3 and 4k spins - 1 minute on a 90° hotplate with the lid lowered
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
1,254

edits

Navigation menu