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* Substrate thicknesses (with existing chucks) 175-675 μm (the range from 400-475 μm thick may not work)
* 400nm isolated lines, 500nm gratings and isolated trenches
* 10 mm pieces up to 6" wafers
* 14 mm max die size
* Several chuck sizes available
** 10mm - (380-580 µm)
** 2" - (205-405 µm), (385-585 µm)
** 4" - (150-350 µm), (405-605 µm), (555-755 µm), 635-835 µm), (895-1095 µm), (1175-1375 µm)
** 6" - (560-760 µm), (860-1060 µm)
==System overview==
