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LAM 9400/Processes/LNF HfO2

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{{Infobox process
|technology = RIE
|material = HfO2HfO<sub>2</sub>
|mask = Photoresist
|gases = BCl<sub>3</sub>
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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