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GSI PECVD

40 bytes removed, 9 months ago
***[[Silane|SiH<sub>4</sub>]] - 300 sccm
***[[Silane|SiH<sub>4</sub>]] - 5 sccm
***[[Oxygen|O<sub>2</sub>]] - 1000 sccm
***[[Ammonia|NH<sub>3</sub>]] - 1000 sccm
***[[Nitrous oxide|N<sub>2</sub>O<sub>]] - 2000 sccm
Administrator, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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