Changes

Jump to navigation Jump to search

CL200 Megasonic Cleaner

66 bytes removed, 1 year ago
no edit summary
<!--A more general description of what the tool is capable of doing.-->
* Remove particulate from wafers
* Remove [[organics]] via [[JTB 100]]
==System Overview==
==Supported Processes==
The CL200 has standard recipes for a megasonic clean with only DI or with DI and JTB 100. The main editable parameters are the number of scans, number of cycles, and the spin speed.
{| class="wikitable" border="1"
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,152

edits

Navigation menu