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STS APS DGRIE/Processes/uk submicron etch

150 bytes removed, 6 months ago
[[File:Uk_submicron_2um.jpg|thumbnail]]
[[File:Uk_submicron_1um.jpg|thumbnail]]
Detailed characterization data for the etch can be found [https://drive.google.com/a/lnf.umich.edu/file/d/0B76AgohVTgqdeVltQ0dKTVo5akU/preview here].
===Etch/Dep Rate===
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