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STS APS DGRIE/Processes/LNF Polymer

99 bytes added, 6 months ago
*Parylene: 1.3 µm/min
*Platinum: ~1.5 nm/min
*SiO2SiO<sub>2</sub>: 28 nm/min*Aluminum: < 2 nm/min (varies with etch time; e.g. 30 sec or less is higher, ~4 nm/min)
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