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==Etch Rates==
*Polyimide: 920 nm/min
*Parylene: 1.3 µm/min(user reported)
*Platinum: ~1.5 nm/min
*SiO<sub>2</sub>: 28 nm/min
*Aluminum: < 2 nm/min (varies with etch time; e.g. 30 sec or less is higher, ~4 nm/min) (user reported)
==Parameters==
