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Lab 18-2

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|mask =
|size = 150mm x 4mm and smaller samples
|gases = [[Ar]], [[N2|N<sub>2</sub>]], [[O2|O<sub>2</sub>]]
|overview = <!--[https://docs.google.com/a/lnf.umich.edu/document/d/1UZYJ8unAjQOIJ3nJpa1fwXxYKMyW12k6eDR-A-P6fIE/preview System Overview]-->
|sop = <!--[https://docs.google.com/a/lnf.umich.edu/document/d/1EPC0U7RQCQLbFe4fL90aMUlLz-fydskqWrUs4hVPpbM/preview SOP]-->
<!-- Insert the tool description here -->
Lab 18-2 is a [[Sputter_deposition|sputter deposition ]] tool used for the application of very thin films; 10-2000nm. This tool is set up to deposit a range of metals primarily: including; Au, Ti, Pt, Cr, and W, Al and Ir. Most deposited films are precise to +/-1 nmamong others.
==Announcements==
<!-- *Update this with announcements as necessary -->
*Materials are changed every Monday {{#widget:Iframe|url=https://docs.google.com/spreadsheets/d/e/2PACX-1vRlmI6w0KI2KXYHH8xyUxhCIDwpUBR0qohNJR61GuVr64OLT9rNYjGCAQ0o9XEGKd2QPwqdJ6uVdsB4/pubhtml?gid=1242670380&amp;single=true&amp;widget=true&amp;headers=false|width=900|height=500|border=0}} [https://docs.google.com/spreadsheets/d/1yMY0SG8PDlF4UWxz96uJVnmP9mcxYr0wGc1xmzmgF48/edit#gid=1242670380| LNF Sputter CalendarLink]*Need a different metal? Request it with Helpdesk!
==Capabilities==
* Computer controlled recipes
* Load lock supported processing
* limited Limited film stress versatility with in film development.* Reactive Film capabilities (Ar, O<sub>2</sub>, and N<sub>2</sub>)
==Supported Processes==
{{#widget:GoogleDoc|key=1R_uj2oR6XJHc4D-J8opSyOfX-Xjf9-9ZVN3Jsln4c_o}}
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=== Tool Manual ===
Includes an introduction to the tool and reservation information.
<br>
<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
{{#widget:GoogleDoc|key=1tXD5ABUT7U9eY8iZhgvfND5XGPfkHmby6O6Tp-9bU1A}}
==Checkout Procedure==
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreUser
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