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Lab 18-2

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<!-- Insert the tool description here -->
Lab 18-2 is a [[Sputter_deposition|sputter deposition]] tool used for the application of very thin films; 10-2000nm. This tool is set up to deposit a range of metalsincluding; Au, Ti, Pt, Cr, and W and Ir among others. Most deposited films are precise to +/-1 nm.
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*Materials are changed every Monday {{#widget:Iframe|url=;single=true&amp;widget=true&amp;headers=false|width=900|height=500|border=0}} [| LNF Sputter CalendarLink]*Need a different metal? Request it with Helpdesk!
* Computer controlled recipes
* Load lock supported processing
* limited Limited film stress versatility with in film development.
* Reactive Film capabilities (Ar, and N<sub>2</sub>)
=== Tool Manual ===
Includes an introduction to the tool and reservation information.
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==Checkout Procedure==
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreUser


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