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CEE 200X photoresist spinner 1

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The [[{{PAGENAME}}]] is a fully programmable, automatic dispense, [[photoresist]] spinner located in 1440C. This tool has multiple chucks for 4" and 6" wafers, as well as pieces up to 2". It has automatic photoresist dispensers, but can also accommodate [ manual dispensing].
On June 27th the liner at the CEE 200X will be removed, and LOR will no longer be allowed to spun on the tool. Spinning LOR after June 27th will result in removal of access to the CEE 200X. LOR and other non-standard resist must be spun on the Spinner CEE Apogee.
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