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Plasmatherm 790

29 bytes added, 7 years ago
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{{lead too short}}
{{#vardefine:toolid|10030}} {{#vardefine:technology|RIE}} {{#vardefine:restriction|3}} [[Category:PECVD_equipment]]
{{infobox equipment
|restriction = [[{{PAGENAME}}#Material_Restrictions|Metals]]
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Administrators
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