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Plasmatherm 790/Processes/L nit350

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|material = [[Silicon nitride|Si<sub>3</sub>N<sub>4</sub>]]
|chemicals =
|gases = [[SiH4|SiH<sub>4</sub>]], [[NH3|NH<sub>3</sub>]], [[Nitrogen|N<sub>2</sub>]], [[Helium|He]]
|created =
|modified =
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